On July 27-28, 2026, The Information and then Reuters confirmed the start of volume production of domestic Chinese deep ultraviolet (DUV) immersion lithography tools by Shanghai Aishengna Electronic Technology Group (a state-owned entity created in 2023, with a capital of approximately 7 billion CNY, integrating teams from Yuliangsheng/SiCarrier-Huawei and SMEE).
Target: approximately 5 machines…
